An Edge-Based Smoothed FEM for Multiscale Electrostatic Lens Modeling

Abstract

In this paper, an edge based smoothed finite element method (ES-FEM) for 3D multiscale electrostatic lens modeling is presented. In the ES-FEM, the computational domain is first decomposed into a number of non-overlapping smoothing domains associated with each edge of tetrahedrons. Unlike the traditional FEM, the smoothed gradient technique is then applied to averaging the gradient of nodal basis functions in ES-FEM and leads to an averaged stiff matrix. Since adjacent geometry information is considered in the ES-FEM, it is much more stable to mesh distortions. A multiscale electrostatic lens is modeled to demonstrate the capabilities of the ES-FEM. Therefore, the ES-FEM shows great potential to solve practical complex multiscale problems.