Abstract
A fully ECL-compatible GaAs enhancement/depletion (E/D)-MESFET 1-kb static RAM was designed, fabricated, and tested. Direct-coupled FET logic is used for the memory array while buffered FET logic is utilized in the peripheral circuitry to provide an ECL 100 K interface. The memory cell area is 774 /spl mu/m/SUP 2/, and the chip size is 2.0/spl times/1.75 mm/SUP 2/. Fabrication of the 1-kb RAM involves a fully implanted two-threshold process with true double-level metal interconnection. A minimum access time of 1.3 ns has been obtained with a total power dissipation of 1.4 W (memory array power dissipation is only ~40 mW). The output voltage swing across a 50-/spl Omega/ load is 750 mV.
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