Abstract
When based on the image formation theory of an object studied in high resolution electron microscopes, the amount of focusing associated with the astigmatism was derived from measurements of the phase transfer function of the computer generated diffractograms, together with a line spectrum integration using the one-dimensional Fourier transform of the specimen. It was successfully found that an automatic focusing and astigmatism correction system with higher accuracy can be achieved by an on-line computer system.
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