An Automated Electrochemical Probe for Evaluation of Thin Films

Abstract

An electrochemical probe station (EPS) for automated electrochemical testing of electronic-grade thin films is presented. Similar in design to a scanning droplet cell, this modular system features a flexible probe tip capable of contacting both metallic and oxide surfaces. Using the highly sensitive Pt-H2SO4 system, it is demonstrated that the EPS obtains results equivalent to those of a traditional electrochemical cell. Further, electrical testing of thin film PbZr0.52Ti0.48O3 shows that this system may be used to ascertain fundamental electrical properties of dielectric films.