An atomic force microscope-like dual-stage force controlled fast tool servo for in-process inspection of micro-structured surfaces

Abstract

This study presents the development of a dual-stage force sensor integrated fast tool servo (FS-FTS) for in-process inspection of micro-structures. With the cutting tool serving as a probe, the measurement principle of the FS-FTS is similar to that of an atomic force microscope (AFM). The force modulation method, inspired by the tapping mode AFM, is employed to detect the weak contact between the cutting tool and the workpiece. The primary stage of the dual-stage FTS is responsible for tracking the surface profile of the micro-structures while the secondary stage offers the high-frequency oscillation to modulate the force signal. An experimental method is proposed to determine the optimal oscillation frequency. The transfer function of the FS-FTS, from the input voltage of the primary stage to the output force of the force detection module, is identified, and a notch filter integrated feedback controller is designed for the force control. With the designed dual-stage FS-FTS and force controller, the tip of the cutting tool could follow the unknown workpiece contour with a specified constant contact force, and the surface profile is obtained through the measured displacement of the primary stage. The feasibility and superiority of the developed system are validated through the in-process inspection of micro-lens with a depth of 19μm. The results demonstrate that the developed FS-FTS realizes the sub-micron profile measurement with a scanning speed of 150μm/min, and the depth of the resulting surface scratches is less than 20 nm.