AN ASYMPTOTIC ELECTROSTATIC MODEL OF AN ARRAY OF MICROMIRRORS

Abstract

This paper discusses a multiscale electrostatic model of a two-dimensional micromirror array. It is applicable to very large arrays with several zones of electrical actuation. The model is made with periodic solutions and four kinds of boundary layer effects at outer boundaries, interfaces between different actuation zones, and outer and inner edges. This work is done in the context of the development of a symbolic calculation software based on an extension-combination principle, so that the model derivations are constructed in such a way as to follow the same algorithm.