Abstract
Hysteresis behaviour degrades the positioning accuracy of PZT actuator for ultrahigh-precision positioning applications. In this paper, a corrected hysteresis model based on Bouc-Wen model for modelling the asymmetric hysteresis behaviour of PZT actuator is established by introducing an input biasφand an asymmetric factorΔΦinto the standard Bouc-Wen hysteresis model. A modified particle swarm optimization (MPSO) algorithm is established and realized to identify and optimize the model parameters. Feasibility and effectiveness of MPSO are proved by experiment and numerical simulation. The research results show that the corrected hysteresis model can represent the asymmetric hysteresis behaviour of the PZT actuator more accurately than the noncorrected hysteresis model based on the Bouc-Wen model. The MPSO parameter identification method can effectively identify the parameters of the corrected and noncorrected hysteresis models. Some cases demonstrate the corrected hysteresis model and the MPSO parameter identification method can be used to model smart materials and structure systems with the asymmetric hysteresis behaviour.
Highlights
In recent years, as the requirements of the high positioning accuracy increase in the semiconductor and precision manufacturing industry, high-precision positioning devices are necessary in the applications
A corrected hysteresis model based on Bouc-Wen model for modelling the asymmetric hysteresis behaviour of PZT actuator is established by introducing an input bias φ and an asymmetric factor Δ Φ into the standard Bouc-Wen hysteresis model
Feasibility and effectiveness of modified particle swarm optimization (MPSO) are proved by experiment and numerical simulation
Summary
As the requirements of the high positioning accuracy increase in the semiconductor and precision manufacturing industry, high-precision positioning devices are necessary in the applications. The standard Bouc-Wen model described a symmetric hysteresis behaviour, but the PZT actuator possesses asymmetric hysteresis [18]. There are several system identification methods usually employed to determine the parameters of the Bouc-Wen model, including least square method [20], genetic algorithm (GA) [21], particle swarm optimization (PSO) [22]. A corrected hysteresis model based on BoucWen model is proposed and established in order to solve the problem of asymmetric hysteresis for the PZT actuator.
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