An Assessment of Chemical Vapor Deposition Synthesis of SnO<sub>2</sub> Nanowires by Statistical Design

Abstract

This paper studies the chemical vapor deposition (CVD) synthesis conditions for tin oxide (SnO2) nanowires (NWs) by using statistical design of experiment (DOE). The influences of synthesis parameters (growth temperature, deposition time and flow rate of argon) on SnO2 NWs diameter were studied. From perturbation analysis with DOE, it was found that temperature gave the most significant effect to the diameter of SnO2 NWs via CVD method followed by flowrate of argon and deposition time. Furthermore, based on the cube graph, the smallest SnO2 NWs (~18 nm) can be obtained at temperature of 850 °C with argon flow rate of 100 sccm using a deposition time of 60 min. On the other hand, the largest SnO2 NWs (~248 nm) can be produced at 900 °C.