Abstract
RHEED (reflection high energy electron diffraction) is a technique widely used in molecular beam epitaxy (MBE) and for the characterization of surfaces in other contexts. Despite its widespread use, however, the interpretation of RHEED has largely been limited to the use of positions of the reflections with no attempt made to use the intensities in the patterns.The reasons for this are related to the complexity of RHEED computations. There are several methods which can be used to calculate RHEED intensities from flat surfaces. However, in MBE (and other crystal growth methods) where RHEED is most often used, the surfaces are rough. Of the dynamical methods for calculating RHEED intensities from flat surfaces, only the modified Cowley-Moodie multislice method with the edge patching algorithm can be applied to rough surfaces without making severe approximations. This method is computationally intensive because the ensemble average over the statistical parameters of the surface cannot be done before the dynamical calculations.
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