Abstract
Optimization is an important area of research. As many optimization problems are NP-Hard it is important to have a wide selection of heuristic approaches to choose from when solving problems. Prioritized planning is a technique traditionally used to solve the multi-robot path planning problem. In this paper we investigate how incremental scheduling, a technique based upon prioritized planning can be applied to scheduling wafer processing in a cluster tool. For our test case our approach is shown to be capable of finding a plan of equal quality to other scheduling approaches and thus suggests our method could be of potential use in other manufacturing/material handling applications.
Highlights
(X, Σ, δ, x0, Xm) where Σ is a finite alphabet of events, X is a finite set of states, δ : X ×Σ → X is the state transition function, x0 ∈ X is the initial state, and Xm ⊆ X is the set of marked states
To do this we consider all resources which event σ requires, and take the time at which the last resource becomes free (M AX{ci|σ ∈ ri}). Those resources will be occupied until EARLYR(c, σ) + f (σ), while all other resources cannot be used before the execution time of σ or the time at which they would
The algorithm was tested on the practical CPT model given in Park and Morrison (2015) and shown to be able to get a result of equivalent quality to that found in the original paper
Summary
System behaviours are modeled using finite state automata. Definition 3. |R|} it holds that c′i = LAT ESTf,R(c, σ) if σ ∈ ri or c′i = ci otherwise. Calculate the earliest an event σ can be fired with respect to the current resource usage of c. To do this we consider all resources which event σ requires, and take the time at which the last resource becomes free (M AX{ci|σ ∈ ri}). Those resources will be occupied until EARLYR(c, σ) + f (σ), while all other resources cannot be used before the execution time of σ or the time at which they would
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