Abstract
Characteristic x-ray emission from surface atoms induced by irradiation of an electron beam during reflection high energy electron diffraction (RHEED) depends on the incident glancing angle θg, since distribution of electron current density near surfaces depends on θg. Depth distribution of elements, adatom height, and adatom site can be determined from θg dependence of x-ray emission. This article describes an apparatus for measuring θg dependence of x-ray emission during RHEED. X rays from the surface are sensitively detected at a grazing take-off angle θt close to the critical angle for the total reflection. A small electron gun is rotated around the sample in ultrahigh vacuum to scan θg, during which the sample and x-ray detector are fixed.
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