Abstract
We propose a positioning system with an angstrom resolution. The positioning system has a table guided by a hydrostatic guideway, and a twist-roller friction drive is incorporated into the table. The friction drive converts the rotation of an AC servo driving motor into the linear motion of the table. The twist-roller friction drive is advantageous for ultraprecision positioning, because its lead can be less than 0.1 mm. Monitoring the displacement of the table by a fiber optic displacement sensor, a microcomputer in the system controls the rotational angle of the AC servomotor. Step positioning with several step widths is executed, and it is proved that the positioning resolution is 0.2 nm (2Å). The stroke of the system can be several hundred millimeters. Thus, it is shown that the twist-roller friction drive is suitable for the angstrom-positioning system.
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