Abstract
Pull-in parameters are important parameters of electrostatic actuators. This paper presents three analytical approximate models for calculating the dynamic pull-in voltage and pull-in position of a perforated plate, respectively. The effects of the fringing field are included in two models. The accuracy of the three present models is compared with ANSYS results. Simulation results show that the detailed capacitance model with fringe effect has good agreement with the FEM results.
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