Abstract
A quantitative analysis is given concerning the combined effect of heating rate and pumping speed on thermal desorption mass spectra. It is shown that considerable error in the determination of the activation energy and the pre-exponential factor of desorption can be introduced by the combined effects of high heating rate and low pumping speed. It is found that for an accurate determination of the activation energy and the pre-exponential factor of first-order desorption, the reciprocal of the product of heating rate and pumping time constant should be large, i.e., greater than approximately 0.5.
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