An analysis of imprinted hysteresis loops for a ferroelectric Pb(Zr,Ti)O3 thin film capacitor using the switching transient current measurements

Abstract

This study examined the imprint mechanism of a ferroelectric Pt/Pb(Zr,Ti)O3(150-nm-thick)/Pt capacitor using pulse switching transient current measurements. The progression of the imprint was well explained by the propagation of a localized charge injection area, where there was an increase in coercive voltage and interfacial capacitance over the entire capacitor area. The as-received samples exhibited uniform interfacial capacitance over the total area. Charge injection resulted in a more rectified remanent polarization–applied voltage relationship compared with the as-received sample. Analytic functional forms for the switching charge and local switching area were also derived.