Abstract
ABSTRACTTwo types of mechanical tests associated with acoustic microscopy characterizations were performed to investigate the mechanical stability of PSG and Si3N4 passivation films. An in situ tensile test micro-device was installed under a scanning acoustic microscope to study the damage development in the passivation films deposited on A1,1%Si substrates. The analysis of the attenuation of the acoustic signature of the film/substrate systems and the variations of the leaky surface acoustic wave velocity permitted detection of the cracking and decohesion of the passivation films. The four-point bending test was used to submit passivated aluminum multilayers deposited on silicon substrates to cyclic compression. Then subsurface acoustic images revealed decohered zones in the passivation.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
