Abstract
Water quality monitoring is a critical part of environmental management and protection. The detection of contamination and impurity levels in water is of importance for the protection of public health. In this paper, we present a novel method for detection of impurities in water based on measuring the signal-to-noise ratio (SNR) of the surface acoustic wave (SAW) device. An aluminum nitride (AIN) based SAW device is fabricated for residues detection. NaCl and SiO 2 are regarded as water-soluble and water-insoluble impurities in water respectively. The experimental results show that the SAW propagation surfaces are cleaner after evaporation of different kinds of water samples, which then result in higher SNRs. Nevertheless, for different mass concentrations of NaCl and SiO 2 droplets, the SNRs of the SAW device are lower due to more residues left on the wave propagation path after evaporation.
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