Abstract
High-frequency response analysis (Hi-FRA) is required to predict the resonant behavior of modern microsystems operated over a high frequency range. Algebraic substructuring (AS) method is a powerful numerical technique for FRA. However, the existing AS method is developed for low-FRA, say over the range 1Hz–2KHz. In this work, we extend the AS method for FRA over a given frequency range [ω min ,ω max ]. Therefore, it can be efficiently applied to systems operated at high frequency, say over the range 1MHz–2MHz. The success of the proposed method is demonstrated by Hi-FRA of a microgyroscope.KeywordsHigh-Frequency Response AnalysisAlgebraic SubstructuringMicro-SystemsFrequency Sweep Algorithm
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