An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station

Abstract

We present an advantageous fabrication technology for the integration of pressure sensor into the multi-sensor for micro weather station. Differing from traditional silicon piezoresistive or capacitive pressure sensor, we use platinum piezoresistive pressure sensor in the integration, which can greatly simplify the whole process and also has an excellent performance. We also use adhesive bonding with SU-8 to replace the traditional bonding methods. This bonding method outweighs the traditional bonding methods in many ways. The testing results of the pressure sensor indicate that this simple and convenient fabrication technology is advantageous for the integration.