Abstract
A new sensitivity enhancement scheme, mainly comprised of a harmonic oscillator and a set of magnetic material, is proposed for desirable applications in cantilever-based resonant sensors. The basic idea is to magnetically apply a pre-stress on the harmonic oscillator to achieve a larger frequency offset. The applied axial pre-stress, which varies the equivalent stiffness of the harmonic oscillator, is simulated by an adjustable magnetic force. The resonant frequency is accordingly increased with a larger offset to a certain mass or force, thus enhancing the sensitivity of the harmonic oscillator. A new pressure sensing prototype device, mainly comprised of a triple-beam tuning fork (TBTF), a pressure sensitive film, a set of magnetic and piezoelectric materials, is designed to both theoretically and experimentally verify the validity of the sensitivity enhancement scheme for cantilever-based resonant sensors. The pre-stress can be adjusted by simply applying different magnetic forces. And the sensitivity of the cantilever-based resonant sensors can be further enhanced by optimizing both the position and the magnitude of the pre-stress.
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