Abstract
We propose an active mechanism to retrieve the functionality of RF-MEMS ohmic switches after stiction occurs. The mechanism exploits a micro-heater, embedded within the switch topology, to induce restoring forces on the stuck membrane (thermal expansion) when a current is driven through it. Our experimental investigations prove that driving a pulsed rather than a DC current into the heater, enables a successful release of the tested RF-MEMS stuck devices. The release of stuck RF-MEMS ohmic switches is demonstrated for a cantilever-type micro relay. The mechanism is suitable for a large variety of switch topologies, and it can be embedded with small changes and effort within most of the already existing RF-MEMS ohmic switches, increasing their reliability.
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