Abstract
A novel high-performance smart capacitive angular-position sensor with a full circle measurement range is presented. It is mainly composed of three parts: the capacitive sensing element, a signal processor and a microcontroller. A modified algorithm is used to calculate the position from the capacitor's values. With this algorithm the effect of the main undesired influences is eliminated or strongly reduced and the measurement range of the sensor is extended to 360°. The structure of the sensing element is optimised to reduce the influence of the electric-field bending effect and the nonflatness of electrodes. The signal processor has multi-capacitance input and one period-modulated output and includes a very linear capacitance/period converter. The microcontroller acquires output data of the processor, calculates the positions and optionally communicates with the outside world. The resolution of the smart capacitive angular-position sensor is 0.58 arcsec and the nonlinearity is less than ±90 arcsec (13.8 bits) over 0-360° range for a measurement time of 100 ms
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