Abstract
To realize the high-speed and precise control of the maglev planar motor, a more accurate real-time electromagnetic model, which considers the influence of the coil corners, is proposed in this paper. Three coordinate systems for the stator, mover and corner coil are established. The coil is divided into two segments, the straight coil segment and the corner coil segment, in order to obtain a complete electromagnetic model. When only take the first harmonic of the flux density distribution of a Halbach magnet array into account, the integration method can be carried out towards the two segments according to Lorenz force law. The force and torque analysis formula of the straight coil segment can be derived directly from Newton-Leibniz formula, however, this is not applicable to the corner coil segment. Therefore, Compound Simpson numerical integration method is proposed in this paper to solve the corner segment. With the validation of simulation and experiment, the proposed model has high accuracy and can realize practical application easily.
Highlights
Maglev planar motor have been developed as an alternative to xy-drives constructed of stacked linear motor in the semiconductor industry such as wafer stages.[1,2]
This paper presents an accurate real-time electromagnetic model of maglev planar motor
The proposed model seems to be more complex than the other models in terms of the mathematical expression
Summary
Maglev planar motor have been developed as an alternative to xy-drives constructed of stacked linear motor in the semiconductor industry such as wafer stages.[1,2] The stage driven directly by maglev planar motor has many advantages such as quick response, high accuracy, and simple structure.[3,4,5,6] It can work in the vacuum environment with contaminating it, which can meet the requirement of the next-generation ultraviolet lithography technology.[7,8] maglev planar motor has caught wide attention of researchers in the relevant research field.[9,10,11] In the semiconductor industry, the positioning accuracy and the acceleration are critical parameters.[12]. A moving-coil ironless maglev permanent magnet planar motor with concentric structure is proposed in the paper.[13,14] The concentric winding adopts the square structure instead of the traditional rectangle one.[15]. The Lorenz force equation method[16,17] is widely adopted to calculate the electromagnetic force for the maglev planar motor. The above methods have the disadvantage of overlapping the corner segment of the winding. For all the above methods, the real electromagnetic force on the corner segment has been simplified and does not reflect the real force, leading to the inaccurate computation model of the electromagnetic force and torque. A new method to accurately calculate the electromagnetic model is proposed, which makes up the error from coil simplification demonstrated above. Newton-Leibniz formula and compound Simpson formula are adopted to solve the two segments respectively, in which way a complete model of the coil expression can be obtained
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