Abstract
Dew point sensors are widely used in various fields to provide accurate data of absolute humidity. In this paper, the dew point sensors based on MEMS piezoelectric circular resonator and cantilever are designed and fabricated. The previously reported MEMS dew point sensors suffer unavoidable errors by regarding dew point as the temperature corresponding to the maximum resonant frequency during cooling. Here, a piecewise function fitting dew point identification method is proposed, which considers the influence of relative humidity on resonant frequency and can detect dew point with small error. The results show that the piezoelectric resonant dew point sensor has good accuracy and stability, and the maximum relative error of the dew point is 0.30 °C DP. The proposed dew point sensors and method for identifying dew point have great potential in practices.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
