Abstract

This work reports on the behavior of piezoresistive microcantilever sensors under optimizing conditions of ac electroosmotic enhancement. Piezoresistive microcantilevers are used as sensor elements for detection of concentrated bio-particles. Without preconcentrating the samples, using ac electroosmosis, these bio-particles have been manipulated onto the piezoresistive microcantilever. A piezoresistive microcantilever senses the dimensional changes upon particle exposure as a resistance change. This paper represents the integration of ac electroosmosis with a piezoresistive micro-cantilever sensor for the detection of bio-particles. A working prototype is presented here, and the experiments are conducted on Herpes Simplex type-1 virus (HSV-1) and Escherichia Coli (E. coli) bacteria.

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