Abstract
The cubic-wurtzite phase transition of (Ti,Al)N-based thin films at high temperatures is the chief determing factor for their thermal stability. Nevertheless, its mechanism of atomic shear is not yet well explored theoretically. Here, we correlate the coherent interfaces with wurtzite formation within (Ti,Al)N/ZrN multilayers by a combined ab initio and experimental study. Compared to (Ti,Al)N, the multilayer exhibits a delayed formation of hexagonal close-packed (hcp) wurtzite-type AlN phase, which is encapsulated by face-centered cubic (fcc-)(Ti,Zr)N and fcc-(Zr,Ti)N layers when annealed at 1200 °C. Based on the orientation relationships of (200)fcc//(0001)hcp and (220)fcc//(01-10)hcp among hcp-AlN and neighboring fcc-(Ti,Zr)N as well as fcc-(Zr,Ti)N by the solid-state nudged elastic band (SS-NEB) method, two mechanisms for atomic shear during fcc-hcp transition are proposed. The introduction of ZrN layers effectively suppresses the fcc-hcp transition, due to higher activation energies induced by the coherent interfaces.
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