Abstract
This paper presents a novel compensation method to improve the temperature stability of scale factor in amplitude-modulated (AM) MEMS gyroscope operating in split-mode based on multi parameters fusion compensation, which for the first time weightedly combines the resonant frequency of the primary mode, the voltage amplitude of primary mode displacement, the frequency difference between the primary mode and the sense mode together with the demodulation phase error to restrain the thermal variations of the parameters affecting the scale factor. The results show that an 8ppm/°C temperature sensitivity of the scale factor is obtained over −30°C to 70°C with the proposed compensation technique, which is considerably competitive compared with previously reported results in literatures.
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