Amplitude metrics for field retrieval with hard-edged and uniformly illuminated apertures

Abstract

In field retrieval, the amplitude and phase of the generalized pupil function for an optical system are estimated from multiple defocused measurements of the system point-spread function. A baseline field reconstruction algorithm optimizing a data consistency metric is described. Additionally, two metrics specifically designed to incorporate a priori knowledge about pupil amplitude for hard-edged and uniformly illuminated aperture systems are given. Experimental results demonstrate the benefit of using these amplitude metrics in addition to the baseline metric.