Abstract
Displacement amplifying mechanism for piezoelectric actuators using an elastic guide, such as parallel translation with flexure hinges, to avoid solid-friction-induced stick-slip movement has poor damping. Residual vibration lengthens settling time in quick driving. An impact damper uses collision energy rather than friction to dissipate vibration and operates without compromising the flexure guide’s non-stick-slip movement. Impact dampers are divided into external and loading impact dampers. An external impact damper is applied here to settle transient amplifying-mechanism vibration and to determine differences in damping by setting damper conditions appropriately. The impact damper effectively eliminates residual vibration in the step response.
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