Abstract
Resonant micromechanical charge sensor is widely studied, however, the performance is suffocated by nonlinearity. Here, a sensing enhancement technique based on synchronization is proposed. Charge-sensing amplified by synchronization induced frequency locking of a ratio 9 in a couple of micromechanical oscillators separated over 1 m is demonstrated. One axial strain modulated DETF is working on its flexural mode to detect the electric charge. The sensing output oscillation frequency is injected into a high Q micro-machined disk oscillator via a coaxial cable to form synchronization. We show that the sensitivity of the disk oscillator outputs is improved up to 9 folds due to the frequency locking effect. Also, the equivalent detection frequency stability can be enhanced to 3 folds. The perturbation synchronizing signal can be transmitted over a long distance and may lead to applications for enhancing sensor performance.
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