Abstract
Abstract Titanium carbide films were deposited by chemical vapor deposition from tris(2,2'-bipyridine)titanium. Other films of titanium carbide and niobium carbide were obtained by electron beam vaporization of the corresponding crystalline compound. X-ray and electron diffraction studies showed that the structure of the deposits ranged from microcrystalline to amorphous. The coatings were analyzed by secondary ion mass spectroscopy, Auger electron spectroscopy and electron spectroscopy for chemical analysis. The results of these studies lead to an understanding of the formation and nature of the films. The objective is to modify the mechanical properties of brittle transition metal carbides.
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