Abstract
Stainless steel films were reactively magnetron sputtered in argon/methane gas flow onto oxidized sili- con wafers using austenitic stainless-steel targets. The de- posited films of about 200 nm thickness were characterized by conversion electron Mossbauer spectroscopy, magneto- optical Kerr-effect, X-ray diffraction, scanning electron mi- croscopy, Rutherford backscattering spectrometry, atomic force microscopy, corrosion resistance tests, and Raman spectroscopy. These complementary methods were used for a detailed examination of the carburization effects in the sputtered stainless-steel films. The formation of an amor- phous and soft ferromagnetic phase in a wide range of the processing parameters was found. Further, the influence of the substrate temperature and of post vacuum-annealing were examined to achieve a comprehensive understanding of the carburization process and phase formation.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
