Abstract
Solar cell modules were fabricated in a single-chamber load-lock deposition system. This system routinely produces high efficiency solar cell modules on both small- and large-area substrates. The best solar cell efficiencies were 10.4% on 0.265 cm 2, 8.7% on 420 cm 2 and 8.1% on 1000 cm 2. The high throughput at one or two runs per hour makes the single-chamber load-lock deposition system a valuable research tool which permits rapid progress with great process control. Because of the large-area deposition capability, it can support pilot and manufacturing deposition systems.
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