Abstract

A bendable and thermally stable solar-blind ultraviolet (UV) photodetector has been demonstrated based on Ni/amorphous Ga2O3 (a-Ga2O3)/a-AlN/Cu foil structure. Here, Cu foil can simultaneously act as a bendable substrate and withstand a high-temperature environment. The ultra-wide bandgap a-AlN insulating layer can withstand mechanical tensile stress and effectively act as an insulating layer between a-Ga2O3 and Cu. Thus, the a-Ga2O3-based photodetector shows stable UV response characteristics with different bending radii and temperatures. The photodetector has high responsivity of 0.518 A W−1 and a fast response time of 0.17 s under 200 °C temperature with a 1.46 cm bending radius. With exceptional bendability and thermal stability, this a-Ga2O3-based photodetector has potential applications in harsh environments such as high-power bendable electron devices, flame detection, etc.

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