Abstract
Hydrogen free Ti-doped amorphous carbon layers were prepared by dual beam pulsed laser deposition using two excimer lasers. The air-exposed surfaces were analyzed by high-energy resolved and angular-resolved core-level photoelectron spectroscopy, and were then step-by-step sputtered with an argon gas cluster ion beam (ArGCIB), which is known to be a very gentle technique with respect to changes in surface chemistry. The results show that the top surface of the sample and its sub-surface region differ in composition and in bonding. The top surface is enriched by oxygen-bearing species. Carbon-bearing species located on the surface are mostly in sp3 hybridization. Titanium carbide clusters, TiC, are not directly exposed at the surface. They are embedded in a carbon network with dominating C sp2 hybridization. Their interface is formed by a distinct carbon-rich titanium carbide with stoichiometry close to TiC3. The surface damage induced by ArGCIB was found to be minimal, verifiably affecting carbon atoms in the carbon network.
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