Abstract
This chapter discusses that in order to increase the deposition rate of an amorphous carbon film using the shunting arc system, a magnetically driven shunting arc is proposed and tested to clarify the self-magnetically drive characteristics of this system and deposition rate of carbon film. The shunting arc plasma is successfully accelerated along the rails. The plasma is accelerated along the rail with average velocity of 4 km/sec in pressure range from 0.054 to 1.4 Pascals (Pa), and went out towards a target set at 40 mm apart from the muzzle. The deposition rate of a carbon film is obtained to 100 nm for a process time of 1 rain. The carbon film in an amorphous state and a typical Raman spectrum with the D and G band is also observed.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
