Abstract
It was found that the atomic-hydrogen treatment of n-GaAs epitaxial samples having initially high-quality surfaces both with a SiO2 protective film on the n-layer surface and without it can lead to the amorphization of these surfaces and a thin (≈7 nm) surface layer, which is accompanied by the formation of a hydride phase. The lack of a hydrogen sublattice in the near-surface layer can imply that the main driving forces in the amorphization of epitaxial n-GaAs are short-range chemical interactions between hydrogen atoms and also between hydrogen atoms and atoms of the basic matrix of the crystal.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
