Abstract
A hollow fiber composed of a glass capillary tube and a metal thin film upon the inside of the tube is proposed for the delivery of ArF-excimer laser light. From theoretical analysis, aluminum is chosen as the metal layer. A thin aluminum film is deposited by metallorganic chemical-vapor deposition, with dimethylethylamine alane employed as the source material. Measured loss spectra in vacuum-ultraviolet and ultraviolet regions and losses for ArF-excimer laser light show the low-loss property of the aluminum-coated fiber at the 193-nm wavelength of ArF-excimer laser light. The straight loss of the 1-m long, 1-mm-bore fiber is 1.0 dB.
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