Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)

Abstract

In this work, we study thickness down-scaling as a technique to miniaturize piezoelectric ultrasound transducers while preserving a frequency of operation that falls in the 40–100 kHz range, where airborne ultrasound can propagate over several meters distances and attenuation is $100\,\,\mu \text{m}\,\,\times 100\,\,\mu \text{m}$ . We compare this performance to the sensitivities of ultrasound sensors recently published in literature, showing an increase in Rx sensitivity per unit area between 1 and 2 orders of magnitude. [2021-0094]