Abstract
The XPS spectra of argon ion etched aluminum metal were collected with a VSW HA150. This spectrometer is equipped with monochromatic Al Kα x-radiation, a 16 channel multichannel detector, and an electrostatic hemispherical analyzer with a radius of 150 mm providing an instrument with exceptional capabilities. We report the Al 2p core level with resolved 2p1/2 and 2p3/2 spin-orbit split components. The peak to valley separation on the high binding energy side between the spin orbit components was determined to be 0.18 eV and the separation between these components was 0.44 eV. The valence band, survey, and the Al 2s, O 1s, and C 1s core levels are also reported.
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