Abstract
The feasibility of using aluminum-doped zinc oxide (AZO) as a piezoresistive pressure sensor material is reported. AZO has attracted a great deal of attention in many applications because of its nontoxicity, abundancy and lower cost than other materials such as indium tin oxide (ITO). The AZO films were deposited on polyethylene (PE) substrates by a radio-frequency (rf) magnetron sputtering method and they were used as the diaphragms of the pressure sensors. The piezoresistive sensor was tested for different pressures in vacuum and gage pressure conditions. The response characteristics indicated that resistance increased with the bending of the AZO layer in both compressive and tensile operation modes. The sensor characteristics exhibited that the AZO piezoresistive sensor can be used to measure ambient pressure quantitatively. This investigation indicated that AZO can be used as an alternative material for the fabrication of pressure sensors.
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