Abstract
In superconducting quantum devices, air bridges enable increased circuit complexity and density, and mitigate the risk of microwave loss arising from mode mixing. We implement aluminum air bridges using a simple process based on single-step electron-beam gradient exposure. The resulting bridges have sizes ranging from 20 µm to 100 µm, with a yield exceeding 99% for lengths up to 36 µm. When used to connect ground planes in coplanar waveguide resonators, the induced loss contributed to the system is negligible, corresponding to a loss per bridge less than 1.0×10−8. The bridge process is compatible with Josephson junctions and allows for the simultaneous creation of low loss bandages between superconducting layers.
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