Abstract
A wireless passive pressure sensor equivalent to inductive-capacitive (LC) resonance circuit and based on alumina ceramic is fabricated by using high temperature sintering ceramic and post-fire metallization processes. Cylindrical copper spiral reader antenna and insulation layer are designed to realize the wireless measurement for the sensor in high temperature environment. The high temperature performance of the sensor is analyzed and discussed by studying the phase-frequency and amplitude-frequency characteristics of reader antenna. The average frequency change of sensor is 0.68 kHz/°C when the temperature changes from 27°C to 700°C and the relative change of twice measurements is 2.12%, with high characteristic of repeatability. The study of temperature-drift characteristic of pressure sensor in high temperature environment lays a good basis for the temperature compensation methods and insures the pressure signal readout accurately.
Highlights
Pressure signal acquisition has been greatly demanded in harsh environment, featuring turbine engine design, and petroleum exploration, whereas all of them require the sensor capable of operating at more than 200 °C [1,2,3]
Pressure sensors applied for high temperature have been carried out in-depth research, including silicon on insulator (SOI) high temperature pressure sensor [6, 7], SiC high temperature pressure sensor [8], silicon-sapphire pressure sensor [9], fiber optic pressure sensor [10], [11], surface acoustic wave (SAW) pressure sensor [12, 13], and the pressure sensor equivalent to inductive-capacitive (LC) resonance circuit based pressure sensor [14,15,16]
The wireless passive pressure sensor based on alumina ceramic is presented here to analyze its high temperature performance
Summary
Pressure signal acquisition has been greatly demanded in harsh environment, featuring turbine engine design, and petroleum exploration, whereas all of them require the sensor capable of operating at more than 200 °C [1,2,3]. The pressure sensor application is still deficient in at least the following two aspects, or just meets the minimum demands: one is ultra-high temperature environment, the other is metallic environment, which causes serious electromagnetic interference. A pressure sensor based on LC resonance circuit. The sensor is under test at different temperatures to analyze and discuss the impact on the pressure signal readout, which provides valuable reference to the research of temperature compensation
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