Abstract
One of the hot topics in MEMS research is the development of miniature solid-state angular-rate sensors (gyroscopes). These devices have a number of potential applications including navigation systems for divers and unmanned vehicles, interpolators for periods of GPS loss of signal, and automobile skid sensors. For many of these applications, constant-rate (dc) calibrations are not representative of the expected excitations. Fortunately, high-quality ac-rate calibration can be done with an inexpensive apparatus by means of reciprocity. A suspended platform is driven in torsional oscillation by a pair of geophones acting as a force couple. Another pair of geophones is used as an angular velocity sensor. Since both of these transducer pairs are reciprocal, they can be used in conjunction with the device under test to perform a complete reciprocity calibration. The platform produces very smooth ac-rate motion from 1 to 20 Hz at rates of below 0.1 deg (rms)/h to 200 deg/h. The transfer impedance used in the reciprocity calibration is determined by the polar moment of inertia of the platform. This can be determined accurately by adjusting the separation of a symmetrically placed pair of masses and measuring the change in natural frequency. [Work supported by the Office of Naval Research.]
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