Alternate monatomic layer sputter deposition of FCT (L1 0-type) ordered FePt and CoPt films

Abstract

FePt and CoPt alloy films with FCT(0 0 1) structural phase were deposited by sputtering. The films were formed by periodically alternating monatomic layers deposition of Fe(Co) and Pt, on MgO(1 0 0) substrates, with and without a Pt buffer layer, at substrate temperatures ( T S) ranging from 200 to 500 °C. The X-ray diffraction patterns show the formation of the FCT crystalline structure in FePt films deposited at T S ⩾ 2 0 0 ° C . Hysteresis measurements, using Vibrating Sample Magnetrometry, show that FePt and CoPt films with predominant FCT(0 0 1) phase are perpendicularly magnetized. The long range order parameter S = 0.5 8 demonstrates the good degree of chemical order in FePt film prepared at T S = 4 0 0 ° C . The Experimental results demonstrate that the alternate monatomic layer sputter deposition technique is very effective to grow Fe(Co)Pt ordered alloy at moderate T S.