Abstract
In this paper we analyze the frequency response of surface acoustic wave (SAW) filters built on (00·2)-oriented AlN films deposited on silicon substrates. The experimental scattering parameters (Sij) of the filters were fitted using our own circuital model that takes into account the theoretical response of the ideal SAW along with all the external and internal parasitic effects. We discuss the relation between the different circuital elements and the physical properties of the SAW device (geometry, substrate resistivity, thickness of the piezoelectric layer, etc.) and the parasitic effects due to the packaging and the wire bonding. On the basis of this analysis, some guidelines for the design of SAW structures with an optimum frequency response are given.
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