Abstract

In this paper we analyze the frequency response of surface acoustic wave (SAW) filters built on (00·2)-oriented AlN films deposited on silicon substrates. The experimental scattering parameters (Sij) of the filters were fitted using our own circuital model that takes into account the theoretical response of the ideal SAW along with all the external and internal parasitic effects. We discuss the relation between the different circuital elements and the physical properties of the SAW device (geometry, substrate resistivity, thickness of the piezoelectric layer, etc.) and the parasitic effects due to the packaging and the wire bonding. On the basis of this analysis, some guidelines for the design of SAW structures with an optimum frequency response are given.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.