AlN Production in Co-Flow Filtration Mode at Low Pressures.

Nikolay Evseev,Mansur Ziatdinov,Alexei Vakutin,Pavel Nikitin,Ilya Zhukov

doi:10.3390/ma14195482

Abstract

In this work, the process for obtaining aluminum nitride in the combustion mode of co-flow filtration of a nitrogen–argon mixture was investigated. The combustion of granules consisting of aluminum and aluminum nitride as an inert diluent was studied under conditions of co-current filtration in a flow of nitrogen and a nitrogen–argon mixture in the range of a specific flow rate of 1.5–5.0 cm3/(s∙cm2). It was found that the specific flow rate of the gas mixture and the amount of argon in the nitrogen–argon mixture had a significant effect on the rate and the temperature of combustion. The structure and phase composition of the synthesis products were studied. The maximum achieved yield of the AlN phase was 95 wt.%. Moreover, this method is energy efficient and allows the production of metal nitrides without the use of high-pressure reactors.

Highlights

Ziatdinov, M.; Zhukov, I.; Vakutin, A.Aluminum nitride is a unique compound of high applied value in the field of microelectronics, in particular, for creating substrates for hybrid microcircuits based on high thermal conductivity ceramics [1]
We studied the effect of the specific flow rate of the gas mixture on the rate and combustion temperature of aluminum, the structure, and the phase composition of the materials obtained during the synthesis of aluminum nitride in the co-flow filtration mode
2 shows images of combustion products of AlN-Al mixtures with in various contrations obtained in the co-flow filtration mode in a nitrogen atmosphere a specific centrations obtained in the co-flow filtration mode in a nitrogen atmosphere with a speflow rate of 3.0 cm /(s·cm )

Summary

Introduction

Aluminum nitride is a unique compound of high applied value in the field of microelectronics, in particular, for creating substrates for hybrid microcircuits based on high thermal conductivity ceramics [1]. Due to its high thermal conductivity and low coefficient of thermal expansion, aluminum nitride is one of the promising materials for the production of such substrates [2]. To obtain AlN ceramics with high thermal conductivity, the initial powder must satisfy a number of conditions, such as chemical purity, shape, and particle size distribution of particles. The thermal conductivity of AlN decreases due to the presence of impurities such as iron, silicon, and oxygen [3,4]. Studies have shown that the oxygen impurity has the greatest effect on the thermal conductivity of AlN ceramics

Methods

Results

Conclusion