Abstract
The technology of obtaining thin AlN piezoelectric films on a glass substrate by means of a reactive r.f. magnetron sputtering method is considered. For obtaining polycrystalline oriented films with perfect crystallization, it is necessary to have certain technological conditions for their growth. The prospects of using these films in SAW sensors are discussed. An example is given of a SAW temperature sensor implemented on the basis of an AlN film on a glass substrate.
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