Abstract

A feasible “lightning-shaped” zigzag graphene nanoribbon (ZGNR) structure for planar interconnects is proposed. Based on the density functional theory and non-equilibrium Green's function, the electron transport properties are evaluated. The lightning-shaped structure increases significantly the conductance of the graphene interconnect with an odd number of zigzag chains. This proposed technique can effectively utilize the linear I-V characteristic of asymmetric ZGNRs for interconnect application. Variability study accounting for width/length variation and the edge effect is also included. The transmission spectra, transmission eigenstates, and transmission pathways are analyzed to gain the physical insights. This lightning-shaped ZGNR enables all 2D material-based devices and circuits on flexible and transparent substrates.

Highlights

  • Since copper replaced aluminum for the main stream of state-of-the-art interconnect material, ULSI performance has been improved along the technology roadmap

  • Our results show that the proposed zigzag graphene nanoribbon (ZGNR) is feasible in various layout schematics

  • The linear I-V characteristics of asymmetric ZGNRs have been analyzed in Ref. 15

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Summary

Introduction

Since copper replaced aluminum for the main stream of state-of-the-art interconnect material, ULSI performance has been improved along the technology roadmap. The resistivity of the copper interconnect increases from node to node. The joule heating, which may intensify electromigration (EM), gets worse in the nanometer regime. Due to these inevitable difficulties of the copper interconnect, researchers are searching for alternative materials to replace copper. In the 2013 ITRS interconnect table, carbon-based materials are suggested as the replacement materials of copper, including carbon nanotubes (CNTs) and graphene nanoribbons (GNRs), which have resistance to the electromigration issue.. Due to graphene’s planar structure, graphene nanoribbons have much controllable fabrication processes, which make GNRs more potential than CNTs to apply in an interconnect In the 2013 ITRS interconnect table, carbon-based materials are suggested as the replacement materials of copper, including carbon nanotubes (CNTs) and graphene nanoribbons (GNRs), which have resistance to the electromigration issue. And, due to graphene’s planar structure, graphene nanoribbons have much controllable fabrication processes, which make GNRs more potential than CNTs to apply in an interconnect

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