Abstract
The authors present the design and realization of an all-silicon acoustic plate wave oscillator system for sensor applications. The plate wave device and the electronic circuitry have been fabricated in two separate silicon chips. The plate wave device embodies a silicon membrane covered with piezoelectric zinc oxide. For protection of the zinc oxide, a thin silicon nitride layer is deposited on top. >
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
